Azenta. has been granted a patent for a substrate transport apparatus featuring a reconfigurable articulated arm. The design includes a modular composite arm link casing with interchangeable extension modules, allowing for customizable lengths and stiffness to optimize substrate handling efficiency. GlobalData’s report on Azenta gives a 360-degree view of the company including its patenting strategy. Buy the report here.

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According to GlobalData’s company profile on Azenta, Semiconductor fabrication robots was a key innovation area identified from patents. Azenta's grant share as of June 2024 was 61%. Grant share is based on the ratio of number of grants to total number of patents.

Reconfigurable substrate transport apparatus with modular arm link

Source: United States Patent and Trademark Office (USPTO). Credit: Azenta Inc

The patent US12046499B2 describes a substrate transport apparatus designed for flexibility and adaptability in its operation. Central to this apparatus is a support frame and an articulated arm that includes at least one movable arm link and an end effector equipped with a substrate holding station. The movable arm link is characterized as a reconfigurable arm link, which features a modular composite arm link casing made up of link case modules that are rigidly coupled. A pulley system is integrated within these modules, extending end-to-end, allowing for effective articulation of the arm link or end effector. The design incorporates interchangeable link case extension modules, each with distinct characteristics that determine the length of the movable arm link, enabling users to select from various predetermined lengths while ensuring that the stiffness of the materials used is compatible with the pulley system's requirements.

Further detailing the apparatus, the patent specifies that the interchangeable link case extension modules possess a box-shaped cross-section, which is tailored to maintain a consistent stiffness across different lengths. The materials used for these modules can vary, with options including stainless steel, and may exhibit higher stiffness compared to the link case end modules. The design also accommodates a low-profile casing that is compact in height, suitable for a bi-symmetrical flexible pulley transmission. Additionally, the apparatus allows for 360° rotation of both the end effector and the pulley wheels, enhancing its operational versatility. The integration of crossed roller bearings for the pulley wheels ensures precise alignment and positioning, further contributing to the apparatus's efficiency in substrate transport applications.

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GlobalData Patent Analytics tracks bibliographic data, legal events data, point in time patent ownerships, and backward and forward citations from global patenting offices. Textual analysis and official patent classifications are used to group patents into key thematic areas and link them to specific companies